Sistemụ ihe eji arụ ọrụ nke Photonic (PIC)
Silicon Photonics bụ usoro ọrụ nke na-eji ihe owuwu planar dabere na ihe silicon iji duzie ìhè iji nweta ọtụtụ ọrụ. Anyị na-elekwasị anya ebe a na itinye silicon photonics n'ịmepụta transmitter na receivers maka nkwukọrịta fiber optic. Ka mkpa ọ dị itinye mgbasa ozi karịa na bandwidth enyere, akara ukwu enyere, na ọnụ ahịa enyere na-abawanye, silicon photonics na-aghọ ihe bara uru karịa. Maka akụkụ anya,teknụzụ njikọta photonica ga-eji ya, a na-ejikwa ọtụtụ transceivers ndị nwere njikọ taa site na iji ihe modulators LiNbO3/planar light-wave (PLC) dị iche iche na ndị nnata InP/PLC.

Foto nke 1: Na-egosi sistemụ ihe eji eme fotonik integrated circuit (PIC) nke a na-ejikarị eme ihe.
Foto nke 1 na-egosi sistemụ ihe PIC kachasị ewu ewu. Site n'aka ekpe gaa n'aka nri bụ silica PIC nke dabeere na silicon (nke a makwaara dị ka PLC), insulator nke dabere na silicon PIC (silicon photonics), lithium niobate (LiNbO3), na otu PIC nke III-V, dị ka InP na GaAs. Akwụkwọ a lekwasịrị anya na photonics nke dabere na silicon. Nasilicon photonics, ihe mgbaàmà ìhè na-agagharịkarị na silicon, nke nwere oghere eriri na-apụtaghị ìhè nke 1.12 electron volts (nwere ogologo ebili mmiri nke 1.1 microns). A na-akụ silicon n'ụdị kristal dị ọcha n'ime ọkụ wee bee ya ka ọ bụrụ wafers, nke taa na-abụkarị 300 mm na dayameta. A na-eme ka elu wafer ahụ dị oxidized iji mepụta oyi akwa silica. A na-eji atọm hydrogen agwakọta otu n'ime wafers ahụ ruo omimi ụfọdụ. A na-agwakọta wafers abụọ ahụ na oghere ma oyi akwa oxide ha na-ejikọ onwe ha. Mgbakọ ahụ na-agbaji n'akụkụ ahịrị ntinye hydrogen ion. A na-eme ka oyi akwa silicon dị na mgbawa ahụ dị mma, na-emesịa hapụ obere oyi akwa kristal Si n'elu wafer silicon "handle" dị n'elu oyi akwa silica. A na-emepụta waveguides site na oyi akwa kristal dị gịrịgịrị a. Ọ bụ ezie na wafers insulator (SOI) dabere na silicon na-eme ka ụzọ waveguides silicon photonics dị obere na-efu, a na-ejikarị ha eme ihe na sekit CMOS dị ala n'ihi obere mmiri ha na-enye.
E nwere ọtụtụ ụdị nduzi wave nke dabere na silicon, dịka egosiri na Foto nke 2. Ha sitere na ntuziaka wave silica nke germanium dị na microscale ruo na ntuziaka wave Silicon Wire nanoscale. Site na ịgwakọta germanium, ọ ga-ekwe omume ime.fotodetectorna nnabata eletrikindị na-eme mgbanwe, na ikekwe ọbụna ihe nkwado anya. Site na iji silicon, iheihe nhazi ngwa anyaenwere ike ime ya. Ala site n'aka ekpe gaa n'aka nri bụ: silicon waya waveguide, silicon nitride waveguide, silicon oxynitride waveguide, thick silicon ridge waveguide, thin silicon nitride waveguide na doped silicon waveguide. N'elu, site n'aka ekpe gaa n'aka nri, e nwere depletion modulators, germanium photodetectors, na germanium.ihe nkwado ngwa anya.

Foto nke 2: Usoro nduzi optical nke dabere na silicon, na-egosi mfu mgbasa ozi nkịtị na ihe ngosi na-agbanwe agbanwe.
Oge ozi: Julaị-15-2024




