Ihe nkiri lithium niobate electro-optic modulator agbakwunyere dị elu

High linearityelectrooptic modulatorna ngwa ngwa ngwa foton
N'ịbawanye ihe achọrọ maka sistemụ nkwurịta okwu, iji nwetakwuo mma nnyefe nke mgbaàmà, ndị mmadụ ga-ejikọta foton na electrons iji nweta uru ndị na-akwado ya, a ga-amụkwa photonic microwave.Achọrọ ihe igwe eletrọnịkị maka ngbanwe ọkụ na ọkụSistemụ fotonic microwave, na isi nzọụkwụ a na-ekpebikarị arụmọrụ nke usoro dum.Ebe ọ bụ na ngbanwe nke mgbama ugboro redio gaa na ngalaba anya bụ usoro mgbama analọgụ, na nkịtịelectro-optical modulatorsnwere ihe na-adịghị adị n'ịntanetị, enwere mgbagha mgbaama dị egwu na usoro ntụgharị.Iji nweta ihe ngbanwe linear dị nso, a na-edobe ebe ọrụ nke modulator n'ebe a na-ahụ anya na orthogonal, mana ọ ka enweghị ike iru ihe achọrọ njikọ foton microwave maka linearity nke modulator.Ndị modul electro-optic nwere linearity dị elu ka achọrọ ngwa ngwa.

A na-enwetakarị ihe ngbanwe ngwa ngwa refractive index modulation nke ihe silicon site na mmetụta mgbasa ozi plasma efu (FCD).Ma mmetụta FCD na modul junction PN adịghị adị, nke na-eme ka modulator silicon dị ntakịrị karịa lithium niobate modulator.Ngwa lithium niobate na-egosipụta nke ọmaelectro-optical modulationNjirimara n'ihi mmetụta Pucker ha.N'otu oge ahụ, lithium niobate ihe nwere uru nke nnukwu bandwit, àgwà modulation dị mma, nkwụsị dị ala, ntinye dị mfe na ndakọrịta na usoro semiconductor, iji ihe nkiri lithium niobate dị mkpa na-eme ka modulator electro-optical modulator dị elu, ma e jiri ya tụnyere silicon. ọ fọrọ nke nta ka ọ bụrụ "obere efere", kamakwa iji nweta oke linearity.Ihe nkiri dị mkpa lithium niobate (LNOI) electro-optic modulator na insulator abụrụla ntụzịaka mmepe na-ekwe nkwa.Site na mmepe nke teknụzụ nkwadebe ihe nkiri dị gịrịgịrị lithium niobate na teknụzụ waveguide etching, arụmọrụ ntụgharị dị elu na ntinye dị elu nke ihe nkiri dị mkpa nke lithium niobate electro-optic modulator aghọwo ubi nke agụmakwụkwọ mba ụwa na ụlọ ọrụ.

Njirimara nke ihe nkiri dị gịrịgịrị lithium niobate
Na United States DAP AR atụmatụ emewo nyocha ndị a nke ihe ndị lithium niobate: ọ bụrụ na etiti nke mgbanwe eletrọnịkị aha ya bụ ihe silicon ihe na-eme ka o kwe omume, mgbe ahụ, ebe ọmụmụ nke mgbanwe photonics nwere ike ịbụ aha nke lithium niobate. .Nke a bụ n'ihi na lithium niobate na-ejikọta mmetụta electro-optical, acousto-optical effect, piezoelectric mmetụta, mmetụta thermoelectric na photorefractive mmetụta na otu, dị ka silicon ihe na ubi nke optics.

N'ihe gbasara njirimara nnyefe ngwa anya, ihe InP nwere nnukwu nnyefe on-chip n'ihi nnabata ọkụ na band 1550nm a na-ejikarị.SiO2 na silicon nitride nwere njirimara nnyefe kacha mma, na ọnwụ nwere ike iru ogo ~ 0.01dB / cm;Ugbu a, mfu waveguide nke obere ihe nkiri lithium niobate waveguide nwere ike iru ọkwa nke 0.03dB/cm, na mfu nke ihe nkiri lithium niobate waveguide nwere ike belata site na mmụba na-aga n'ihu nke ọkwa teknụzụ na mpaghara. n'ọdịnihu.Ya mere, ihe nkiri lithium niobate dị gịrịgịrị ga-egosi arụmọrụ dị mma maka ihe owuwu ọkụ na-agafe agafe dị ka ụzọ photosynthetic, shunt na microring.

N'ihe gbasara ọgbọ ọkụ, naanị InP nwere ike ịgbanye ọkụ ozugbo;Ya mere, maka ngwa nke ngwa ndakwa nri photon, ọ dị mkpa iwebata InP dabeere ìhè isi iyi na LNOI dabeere photonic integrated mgbawa site n'ụzọ nke backloading ịgbado ọkụ ma ọ bụ epitaxial ibu.N'ihe gbasara mgbanwe ọkụ, e mesiri ya ike n'elu na ihe nkiri lithium niobate dị mkpa dị mfe iji nweta bandwit modulation buru ibu, obere voltaji ọkara na obere nnyefe dị ala karịa InP na Si.Ọzọkwa, elu linearity nke electro-optical modulation nke mkpa film lithium niobate ihe dị mkpa maka ngwa ngwa ngwa ngwa foton niile.

N'ihe gbasara ntụgharị ngwa anya, nzaghachi elektrọ-optical dị elu nke ihe nkiri lithium niobate dị mkpa na-eme ka mgba ọkụ anya dabere na LNOI nwere ike ịgbanye ngwa anya ngwa anya dị elu, yana oriri ike nke ngbanwe ngwa ngwa dị otú ahụ dịkwa obere.Maka ngwa ngwa ngwa ngwa ngwa ngwa ngwa ngwa ngwa ngwa teknụzụ foton, mgbawa na-agba ọkụ na-achịkwa anya nwere ikike nke ngbanwe ọsọ ọsọ iji gboo mkpa nyocha ngwa ngwa, yana njirimara nke oriri ike dị ala na-adabara nke ọma na achọrọ siri ike nke nnukwu. - ọnụ ọgụgụ nke usoro nhazi usoro.Ọ bụ ezie na InP dabeere ngwa anya mgba ọkụ nwekwara ike na-aghọta elu-ọsọ ngwa anya ngbanwe ụzọ, ọ ga-ewebata nnukwu mkpọtụ, karịsịa mgbe multilevel ngwa anya mgba ọkụ na-cascaded, ụzụ ọnụọgụ ga-aka njọ.Silicon, SiO2 na silicon nitride ihe nwere ike gbanwee ụzọ ngwa anya site na mmetụta thermo-optical ma ọ bụ mmetụta mgbasa ozi, nke nwere ọghọm nke oriri ike dị elu yana ngwa ngwa ịgbanwe ngwa ngwa.Mgbe nha n'usoro nke usoro a na-adọkpụ dị ukwuu, ọ nweghị ike imezu ihe achọrọ maka oriri ike.

N'ihe gbasara nkwalite ngwa anya, ihesemiconductor optical amplifier (SOA) dabere na InP tozuru oke maka iji azụmaahịa, mana ọ nwere ọghọm nke ọnụọgụ mkpọtụ dị elu na ike mmepụta saturation dị ala, nke na-adịghị akwado ngwa nke foton microwave.The parametric amplification usoro nke mkpa-film lithium niobate waveguide dabeere na igbalite oge na ntụgharị nwere ike nweta obere mkpọtụ na ike dị elu na-chip ngwa anya amplification, nke nwere ike izute nke ọma chọrọ nke integrated microwave photon technology maka on-chip ngwa anya amplification.

N'ihe gbasara nchọpụta ọkụ, ihe nkiri ahụ dị gịrịgịrị lithium niobate nwere njirimara nnyefe dị mma na ìhè na band 1550 nm.A pụghị imezu ọrụ nke ntụgharị fotoelectric, ya mere maka ngwa ngwa ngwa ngwa foton, iji gboo mkpa nke ntụgharị fotoelectric na mgbawa.Ọ dị mkpa ka ewebata nkeji nchọpụta InGaAs ma ọ bụ Ge-Si na ibe ọkụkọ fotonic dabere na LNOI site na ịgbado ọkụ azụ ma ọ bụ uto epitaxial.N'ihe gbasara njikọta na eriri anya, n'ihi na eriri anya n'onwe ya bụ ihe SiO2, ọnọdụ ọnọdụ nke SiO2 waveguide nwere ogo kachasị elu na mpaghara ọnọdụ nke eriri anya, na njikọ dị mma.The mode ubi dayameta nke ike mmachi waveguide nke mkpa film lithium niobate bụ banyere 1μm, nke dị nnọọ iche na mode ubi nke ngwa anya eriri, otú kwesịrị ekwesị mode ntụpọ mgbanwe ga-rụrụ dakọtara mode ubi nke ngwa anya eriri.

N'ihe gbasara njikọta, ma ihe dị iche iche nwere ikike njikọta dị elu na-adabere na radius na-ehulata nke waveguide (nke mmachi nke mpaghara ọnọdụ waveguide na-emetụta).Ntugharị ebili mmiri na-amachibidoro nke ọma na-enye ohere radius na-ehulata pere mpe, nke na-enye aka n'ịghọta njikọta dị elu.Ya mere, mkpagharị ihe nkiri lithium niobate waveguides nwere ikike iji nweta njikọta dị elu.Ya mere, ọdịdị nke ihe nkiri dị gịrịgịrị lithium niobate na-eme ka o kwe omume maka ihe lithium niobate na-arụ ọrụ nke "silicon" anya.Maka itinye foton microwave, uru nke ihe nkiri lithium niobate na-apụta ìhè karịa.